For citations:
Feshchenko V.S., Zyablyuk K.N., Senokosov E.A., Chukita V.I., Kiselev D.A. Features of the receiving of piezoelectric thin films by plasma spraying of powdery AlN. Russian Technological Journal. 2020;8(1):67-79. (In Russ.) https://doi.org/10.32362/2500-316X-2020-8-1-67-79