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THIN FILMS OF BINARY CHALKOGENIDES As2X3 (X = S, Se) PREPARED BY SPIN COATING METHOD

https://doi.org/10.32362/2500-316X-2017-5-3-51-57

Abstract

This paper describes the processes of preparing solutions of binary vitreous semiconductor materials As2X3 (X = S, Se) and fabricating thin films based on them by spin coating. The initial materials are synthesized using semiconductor purity grade solvents by the direct synthesis in pre-vacuumed quartz vials at a maximum temperature of 750ºС and identified by the authors as glass. The obtained amorphous thin films are proven to have an island morphology. The thickness of the As2S3 film can vary in the range of 200 nm (at an average roughness of 0.7 nm) to 2.5 μm (at an average roughness of 100 nm). The thickness of the As2Se3 film can vary in the range of 200 nm (at an average roughness of 8 nm) to 3 μm (at an average roughness of 200 nm). The optical characteristics of thin films are also studied, in particular optical transmission in the visible spectrum. The band gap of the obtained films is determined by employing a Tauc plot. The findings of the experiment are compared with the literature data.

About the Authors

H. N. Thi
Kurnakov Institute of General and Inorganic Chemistry; State Pedagogical University
Russian Federation


E. V. Tekshina
Kurnakov Institute of General and Inorganic Chemistry; State Pedagogical University
Russian Federation


P. I. Lazarenko
National Research University of Electronic Technology
Russian Federation


V. K. Ivanov
Kurnakov Institute of General and Inorganic Chemistry; Moscow Technological University (Institute of Fine Chemical Technologies)
Russian Federation


S. A. Kozyukhin
Kurnakov Institute of General and Inorganic Chemistry; Tomsk State University
Russian Federation


References

1. Фель А. Аморфные и стеклообразные неорганические твердые тела. М.: Мир, 1986. 556 с.

2. Мотт Н., Дэвис Э. Электронные процессы в некристаллических веществах: в 2-х т. М.: Мир, 1982. 662 с.

3. Попов А.И. Физика и технология неупорядоченных полупроводников. М.: Изд. дом МЭИ, 2008. 270 с.

4. Kolobov A.V., Tominaga J. Chalcogenides. Metastability and phase change phenomena. Springer, 2012. 277 р.

5. Kasap S., Frey J.B., Belev G., Tousignant O., Mani H., Greenspan J., Laperriere L., Bubon O., Reznik A., De Crescenzo G., Karim K.S., Rowlands J.A. Amorphous and polycrystalline photoconductors for direct conversion flat panel X-Ray image sensors // Sensors. 2011. V. 11. Р. 5112-5157.

6. Электронные явления в халькогенидных стеклообразных полупроводниках / Под ред. К.Д. Цэндина. СПб.: Наука, 1996. 486 с.

7. Берлин Е.В., Двинин С.А., Сейдман Л.А. Вакуумная технология и оборудование для нанесения и травления тонких пленок. М.: Техносфера, 2007. 176 с.

8. Берлин Е.В., Сейдман Л.А. Получение тонких пленок реактивным магнетронным распылением. М.: Техносфера, 2014. 256 с.

9. Борисова З.У. Халькогенидные полупроводниковые стекла. Л.: Изд-во Ленинградского университета, 1983. 344 с.

10. Chern G.C., Lauks I. Spin-coated amorphous-chalcogenide films // J. Appl. Phys. 1982. № 53(10). P. 6979-6982.

11. Kohoute K., Wagner T., Orava J., Krbal M. Surface morphology of spin-coated As-S-Se chalcogenide thin films // J. Non-Cryst. Solids. 2007. № 353(13-15). Р. 1437-1440.

12. Socrates G. Infrared and Raman characteristic group frequencies. New York: John Wiley & Sons Ltd., 2001. 366 р.

13. Tauc J. The optical properties of solids / Ed. F. Abeles. Amsterdam: North Holland Publ., 1970. P. 227.

14. Котликов Е.Н., Иванов В.А., Крупенников В.А. Исследование оптических констант пленок халькогенидов мышьяка в области длин волн 0.5-2.5 мкм // Оптика и спектроскопия. 2007. Т. 103. № 6. С. 983-987.


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For citations:


Thi H.N., Tekshina E.V., Lazarenko P.I., Ivanov V.K., Kozyukhin S.A. THIN FILMS OF BINARY CHALKOGENIDES As2X3 (X = S, Se) PREPARED BY SPIN COATING METHOD. Russian Technological Journal. 2017;5(3):51-57. (In Russ.) https://doi.org/10.32362/2500-316X-2017-5-3-51-57

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ISSN 2782-3210 (Print)
ISSN 2500-316X (Online)