Evaluation methods of mechanical properties for low-k dielectrics

Russian Technological Journal
Rossiiskii Tekhnologicheskii Zhurnal

ISSN 2782-3210 (Print)
ISSN 2500-316X (Online)

eng | рус

Russian Technological Journal

Advanced search

Ovchinnikov I.S. Evaluation methods of mechanical properties for low-k dielectrics. Russian Technological Journal. 2021;9(3):40-48. (In Russ.) https://doi.org/10.32362/2500-316X-2021-9-3-40-48

Views PDF (Rus): 453

ISSN 2782-3210 (Print)
ISSN 2500-316X (Online)

Editor-in-Chief

Indexing Databases

Article Tools

Email this article (Login required)

Email the author (Login required)

About the Author

I. S. Ovchinnikov
MIREA – Russian Technological University
Russian Federation

Ivan S. Ovchinnikov, Postgraduate Student, Department of Nanoelectronics, Institute of Physics and Technology

78, Vernadskogo pr., Moscow, 119454

Notifications

Username
Password
	Remember me
Not a user? Register with this site Forgot your password?