Evaluation methods of mechanical properties for low-k dielectrics

Russian Technological Journal
Rossiiskii Tekhnologicheskii Zhurnal

ISSN 2782-3210 (Print)
ISSN 2500-316X (Online)

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Russian Technological Journal

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Ovchinnikov I.S. Evaluation methods of mechanical properties for low-k dielectrics. Russian Technological Journal. 2021;9(3):40-48. (In Russ.) https://doi.org/10.32362/2500-316X-2021-9-3-40-48

ISSN 2782-3210 (Print)
ISSN 2500-316X (Online)

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I. S. Ovchinnikov
MIREA – Russian Technological University
Russian Federation

Ivan S. Ovchinnikov, Postgraduate Student, Department of Nanoelectronics, Institute of Physics and Technology

78, Vernadskogo pr., Moscow, 119454

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