D. A. Abdullaev
MIREA – Russian Technological University; Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences
Russian Federation

Daniil A. Abdullaev, Cand. Sci. (Engineering), Researcher of the Institute of Nanotechnology of Microelectronics RAS, Researcher of REC “Technological Center”, MIREA – Russian Technological University. ResearcherID: AAO-5932-2020; Scopus Author ID: 56741027200

32A, Leninsky pr., Moscow 119991
78, Vernadskogo pr., Moscow 119454

R. A. Milovanov
MIREA – Russian Technological University; Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences
Russian Federation

Roman A. Milovanov, Cand. Sci. (Engineering), Deputy Head of Physics and Technology Department Institute of Nanotechnology of Microelectronics RAS, Senior Researcher ESU "Electronics", MIREA – Russian Technological University. Scopus Author ID: 55794840600

32A, Leninsky pr., Moscow 119991
78, Vernadskogo pr., Moscow 119454 

R. L. Volkov
National Research University of Electronic Technology – MIET
Russian Federation

Roman L. Volkov, Cand. Sci. (Physics and Mathematics), Senior Researcher of Electron Microscopy Laboratory, Senior Lecturer of General Physics Chair. ResearcherID: C-8431-2017; Scopus Author ID: 52564796300

1, Shokin pl., Zelenograd, Moscow 124498

N. I. Borgardt
National Research University of Electronic Technology – MIET
Russian Federation

Nikolay I. Borgardt, Dr. Sci. (Physics and Mathematics), Professor, Head of Electron Microscopy Laboratory, Head of the Center for Collective Use "Diagnostics and Modification of Microstructures and Nano-Objects", Head of General Physics Chair. ResearcherID: I-7869-2014; Scopus Author ID: 6603557021

1, Shokin pl., Zelenograd, Moscow 124498

A. N. Lantsev
CJSC Scan
Russian Federation

Andrey N. Lantsev, General Director

10B, Druzhby ul., Moscow 119330

K. A. Vorotilov
https://www.researchgate.net/profile/Konstantin_Vorotilov
MIREA – Russian Technological University
Russian Federation

Konstantin A. Vorotilov, Dr. Sci. (Engineering), Professor, Director of REC “Technological Center”. ResearcherID A-3331-2011; Scopus Author ID: 7004711340

78, Vernadskogo pr., Moscow 119454

A. S. Sigov
https://www.researchgate.net/profile/A_Sigov
MIREA – Russian Technological University
Russian Federation

Alexander S. Sigov, Academician of RAS, President. ResearcherID L-4103-2017; Scopus Author ID: 35557510600

78, Vernadskogo pr., Moscow 119454