Microelectromechanical systems for improved gyroscope design
https://doi.org/10.32362/2500-316X-2025-13-3-103-121
EDN: KBLENU
Abstract
Objectives. Microsystem engineering is currently receiving a great deal of research attention due to the very wide scope of application of its various elements. The present study of the development and creation of modern gyroscopes based on microelectromechanical systems (MEMS gyroscopes) analyzes the risks associated with the technological aspects of their production and identifies promising areas for further development both of MEMS gyroscopes themselves and the technologies used to manufacture them.
Methods. A detailed analysis of existing scientific publications, analytical reviews, and other available sources on MEMS gyroscopes and current trends in the field of microoptoelectromechanical technologies and ferroelectric films was carried out.
Results. A brief description of the design solutions of modern MEMS gyroscopes and their integration into mechatronic systems is presented. The production technologies of MEMS gyroscopes and specifics of the technological equipment used are considered. A separate section discusses the configuration and calibration aspects of these devices. Promising directions for the development of MEMS gyroscopes with an emphasis on the use of microoptoelectromechanical converters and ferroelectric films are highlighted.
Conclusions. Based on the analysis, the prospects for the development of MEMS gyroscopes are shown, despite the existing technological challenges. It is noted that new physical principles and unique technologies can contribute tothe emergence ofnew types ofMEMS gyroscopes using micro-optoelectromechanical converters and ferroelectric films. This, in turn, opens up new horizons for future developments in this area. The necessity of developing new production technologies and specialized equipment to improve the quality of MEMS gyroscopes is demonstrated.
About the Author
P. S. Kuznetsov
State Scientific Research Institute of Instrument Engineering (GosNIIP)
Russian Federation
Competing Interests:
Russian Federation
Pavel S. Kuznetsov, Cand. Sci. (Eng.), Deputy Head of the Experimental Complex of Microelectronics and
Micromechanical Systems
125, Mira pr., Moscow, 129226 Russia
Competing Interests:
The author declares no conflicts of interest.
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- A brief description of the design solutions of modern MEMS gyroscopes and their integration into mechatronic systems is presented.
- The production technologies of MEMS gyroscopes and specifics of the technological equipment used are considered.
- A separate section discusses the configuration and calibration aspects of these devices.
- Promising directions for the development of MEMS gyroscopes with an emphasis on the use of microoptoelectromechanical converters and ferroelectric films are highlighted.
Review
For citations:
Kuznetsov P.S. Microelectromechanical systems for improved gyroscope design. Russian Technological Journal. 2025;13(3):103-121. https://doi.org/10.32362/2500-316X-2025-13-3-103-121. EDN: KBLENU
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